XRD 3003 PTS-HR

XRD 3003 PTS-HR is the High Resolution configuration of the PTS. Additional optical encoders direct on the goniometer circles allow measurements of very narrow rocking curves in arcsec range, that are important e.g. for high quality perfect single crystalline semiconductor materials.

XRD 3003 PTS-HR Diffraction System

Products Features

  • XRD 3003 PTS-configuration with additional topics for high resolution: goniometer: backlash-free
    min. step size: 0,0001°
    reproducibility:+/-0,0001°

Applications

  • HR XRD for investigation of single crystalline substrate materials, epitaxial and other thin films, rocking curves, reciprocal space maps (RSM)
  •  In-plane GID, GISAXS
  •  Reflectometry
  •  Customers in semiconductor and optical industry, physics, materials science

Additional Information

Download Center
Download Center

Visit the Download Center to download product literature, product manuals, software and other items.